› Advances in X-ray and EUV Optics Lead to Broadly Based Scientific and Industrial Opportunities - David Attwood, University of California, Berkeley
09:20-10:00 (40min)
› Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems - Mohammadreza Nematollahi, University of Twente [Netherlands]
10:00-10:20 (20min)
› Extreme ultraviolet multilayers for solar physics applications - Alain Jody Corso, National Research Council of Italy
10:20-10:40 (20min)
› Recent progress in the development of neutron polarizing supermirror at J-PARC - Ryuji Maruyama, J-PARC Center, Japan Atomic Energy Agency (invited)
11:05-11:30 (25min)
› Improved interface widths in Ni/Ti multilayer mirrors by ion-assisted B4C co-deposition - Sjoerd Broekhuijsen, Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden
11:30-11:50 (20min)
› Neutron polarizing supermirrors for the WASP instrument at the ILL: the end of a mass production coating project. - Thierry Bigault, Institut Laue-Langevin
11:50-12:10 (20min)
› Large area neutron supermirror and X-ray multilayer mirror deposition facility at Bhabha Atomic Research Centre INDIA - Arup Biswas, Bhabha Atomic Research Centre
12:10-12:30 (20min)
› Metal-on-metal interface formation laws of nanoscale thin films - Anirudhan Chandrasekaran, Industrial Focus Group XUV Optics, MESA+ institute for Nanotechnology, University of Twente, The Netherlands (invited)
14:00-14:25 (25min)
› Optical constants with improved accuracy in the regions of L-, M- N- and O-absorption edges and their impact in multilayer modeling - Regina Soufli, Lawrence Livermore National Laboratory, Laboratoire Charles Fabry
14:25-14:45 (20min)
› Growth of Mo/Si multilayers at oblique deposition induces periodical nano-arrays - Dmitriy Voronov, Lawrence Berkeley National Laboratory
14:45-15:05 (20min)
› Atomic oxygen diffusion in ultrathin transition metal oxide films at near room temperature - Cristiane Stilhano Vilas Boas, MESA+ Institute for Nanotechnology, University of Twente
15:05-15:25 (20min)
› Manufacturing and characterization of substrates for imaging multilayer X-ray optics - Nikolai Chkhalo, Institute for Physics of Microstructures of Russian Academy of Sciences
15:25-15:45 (20min)
› Advancing X-ray standing wave data analysis - Igor Makhotkin, University of Twente
15:45-18:00 (2h15)
› Angular distribution of a characteristic x-ray emission transmitted by a periodic multilayer - Karine Le Guen, Laboratoire de Chimie Physique - Matière et Rayonnement, Sorbonne Université-CNRS
15:45-18:00 (2h15)
› ATTOLAB SE10: a versatile and integrated beamline for attosecond physics on gases and surfaces - David Bresteau, LIDYL, CEA, CNRS, Université Paris-Saclay, CEA Saclay, 91191 Gif-sur-Yvette, France
15:45-18:00 (2h15)
› Characterization of a monochromatic x-ray imaging using Fresnel zone plates and a multilayer mirror - Annaig CHALEIL, CEA DAM
15:45-18:00 (2h15)
› Characterization of a multilayer x-ray waveguide by x-ray diffuse scattering and grazing incidence x-ray fluorescence - Philippe Jonnard, Laboratoire de Chimie Physique - Matière et Rayonnement - Jussieu
15:45-18:00 (2h15)
› Combined XRR-GIXRF analysis at SOLEIL - Yves Ménesguen, CEA
15:45-18:00 (2h15)
› Dedicated X-ray optics for new generation small X-ray sources - Markus Krämer, AXO DRESDEN GmbH
15:45-18:00 (2h15)
› Derivation of beryllium optical constants from Mo/Be multilayers - Mewael Giday Sertsu, BESSY II, Helmholtz - Zentrum Berlin
15:45-18:00 (2h15)
› Explosive crystallization of Co layers in C/Co/C three-layers - Oleksandr Devizenko, National Technical University “Kharkiv Polytechnic Institute”
15:45-18:00 (2h15)
› Influence of nanometer protective layers on temporal stability and mechanical properties of thin-film aluminium absorption filters - Nikolay Tsybin, Institute of Applied Physics of RAS
15:45-18:00 (2h15)
› Layer structure and phase composition in W/Si multilayer X-ray mirrors - Vitalii Chumak, National Technical University “Kharkiv Polytechnic Institute”
15:45-18:00 (2h15)
› Modeling of EUV multilayers and filters for solar physics and evaluation of tabulated optical constants -
15:45-18:00 (2h15)
› Observation of Polymer Blend Films on Transmission EUV Microscopy - Mitsunori Toyoda, Tohoku University [Sendai], Tokyo Polytechnic University
15:45-18:00 (2h15)
› Optical properties of graphene at hydrogen Lyman alpha - NADEEM AHMED MALIK, Department of Information Engineering, University of Padova, via Gradenigo 6B, 35131 Padova, Italy, CNR-IFN UOS Padova, Via Trasea 7, 35131 Padova, Italy
15:45-18:00 (2h15)
› Progress on Multilayer-coated Optics for High Energy X-ray Imaging Tools at the US National Labs - Chris Walton, Lawrence Livermore National Laboratory
15:45-18:00 (2h15)
› Spatially resolved EUV and XUV reflectometry - Frank Scholze, Physikalisch-Technische Bundesanstalt
15:45-18:00 (2h15)
› Study on propagation of interface imperfections across Co/Ti multilayers with ultra-short period - Piyali Sarkar, Bhabha Atomic Research Center - Arup Biswas, Bhabha Atomic Research Centre - Dibyendu Bhattacharyya, Bhabha Atomic Research Centre
15:45-18:00 (2h15)
› Surface and interface observation of Zirconium oxynitride films as well as TiN/ZrON bilayers - Yanyan Yuan, Jiangsu University of Science and Technology
15:45-18:00 (2h15)
› Trends on Montel X-ray Optics for Inelastic Scattering and Microfocus X-ray Sources for X-ray Diffractometry - Frank Hertlein, incoatec GmbH
15:45-18:00 (2h15)
› Advances in hard x-ray aperiodic multilayers for imaging with large field of view - Catherine Burcklen, Lawrence Livermore National Laboratory (invited)
09:05-09:30 (25min)
› Multilayer mirrors based on beryllium for an extreme ultraviolet range - Vladimir Polkovnikov, Institute for Physics of Microstructures of the RAS
09:30-09:50 (20min)
› Recent advances in development of Cr/Sc based reflective multilayer coatings for x-ray applications - Evgueni Meltchakov, Laboratoire Charles Fabry
09:50-10:10 (20min)
› Chromatic Aberration Control on Microscope Imaging System with EUV Multilayer Mirrors - Mitsunori Toyoda, Tohoku University [Sendai], Tokyo Polytechnic University
10:10-10:30 (20min)
› X-Ray Spectroscopic Methods for Thin Films and Interfaces Study - Elena Filatova, Institute of Physics, St-Petersburg State University, Ulyanovskaya Str. 3, Peterhof, 198504, St. Petersburg (invited)
10:55-11:20 (25min)
› Proximity effect in Co/Pt multilayer investigated through X-ray resonant magnetic reflectivity - Adriano Verna, Università degli Studi Roma Tre
11:20-11:40 (20min)
› Angle-Resolved XRF for Depth-Resolved Elemental Analysis of Stratified Materials in the Laboratory - Jonas Baumann, Technical University Berlin
11:40-12:00 (20min)
› Correlated lateral density fluctuations in the Si layers of a W/Si multilayer revealed by GISAXS - Igor Makhotkin, University of Twente
12:00-12:20 (20min)
› Study of Pd/Y multilayers with B4C barrier layers using GIXR and x-ray standing wave enhanced HAXPES - Meiyi Wu, Sorbonne Université, Faculté des Sciences et Ingénierie, UMR CNRS, Laboratoire de Chimie Physique - Matière et Rayonnement
12:20-12:40 (20min)
› Multilayer coated nanogratings with sub-50 nm periodicity for ultrahigh resolution soft X-ray spectroscopy - Qiushi Huang, Key Laboratory of Advanced Micro-Structured Materials, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University (invited)
09:05-09:30 (25min)
› Gratings for VUV to X-ray applications - François Polack, Synchrotron SOLEIL
09:30-09:50 (20min)
› Highly efficient multilayer-coated blazed gratings for the tender X-ray energy range - Andrey Sokolov, Helmholtz-Zentrum Berlin für Materialien und Energie, BESSY-II, Albert-Einstein-Str. 15, 12489 Berlin, Germany
09:50-10:10 (20min)
› Nearly perfect blaze of the X-ray multilayer-coated gratings with non-conformal boundaries - Maxim Lubov, St. Petersburg Academic University
10:10-10:30 (20min)
› Multilayer x-ray optics at the ESRF - Christian Morawe, The European Synchrotron (invited)
10:55-11:20 (25min)
› Research activity of evaluation tools including soft X-ray optics for the research of EUV lithography at University of Hyogo - TAKEO WATANABE, Center for EUVL, Laboratory of Advanced Science and Technology for Industry, University of Hyogo
11:20-11:40 (20min)
› High reflectance Al/MgF2 mirrors by hot deposition - Juan Larruquert, Instituto de Optica-Consejo Superior de Investigaciones Científicas
11:40-12:00 (20min)
› Broad Band EUV/VUV Multilayer Coatings from 16.9 to 130 nm for a Solar Spectrograph Space Mission - Tobias Fiedler, optiX fab GmbH, Hans-Knöll-Straße 6, 07745 Jena
12:00-12:20 (20min)
› Thin-film preparation and characterization at the HZG - Michael Störmer, Helmholtz-Zentrum Geesthacht
12:20-12:40 (20min)
› Photon-induced damage processes in Ruthenium thin films developed for Free Electron Laser optics - Eric Louis, MESA+ Institute for Nanotechnology, University of Twente
14:00-14:20 (20min)
› Coatings in harsh space environment - Maria Guglielmina Pelizzo, National Reseach Council of Italy
14:20-14:40 (20min)
› A compact soft X-ray reflectometer based on a multi-spectral fluorescence point source - Alexei Erko, Institut für angewandte Photonik (IAP) e. V. Rudower Chaussee 29/31 12489 Berlin
14:40-15:00 (20min)
› X-EUV/XRay Hartmann wavefront sensing for at-wavelength metrology and correction - Fabrice Harms, Imagine Optic
15:00-15:20 (20min)
› Kossel interferences of proton-induced X-ray emission lines to study the interfaces of thin film waveguides - Jiaping Zhang, Sorbonne Université, State Key Laboratory of Solidification Processing, Northwestern Polytechnical University
15:20-15:40 (20min)
Coffee break and exhibition hall
