› Multilayer coated nanogratings with sub-50 nm periodicity for ultrahigh resolution soft X-ray spectroscopy - Qiushi Huang, Key Laboratory of Advanced Micro-Structured Materials, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University (invited)
09:05-09:30 (25min)
› Gratings for VUV to X-ray applications - François Polack, Synchrotron SOLEIL
09:30-09:50 (20min)
› Highly efficient multilayer-coated blazed gratings for the tender X-ray energy range - Andrey Sokolov, Helmholtz-Zentrum Berlin für Materialien und Energie, BESSY-II, Albert-Einstein-Str. 15, 12489 Berlin, Germany
09:50-10:10 (20min)
› Nearly perfect blaze of the X-ray multilayer-coated gratings with non-conformal boundaries - Maxim Lubov, St. Petersburg Academic University
10:10-10:30 (20min)
› Multilayer x-ray optics at the ESRF - Christian Morawe, The European Synchrotron (invited)
10:55-11:20 (25min)
› Research activity of evaluation tools including soft X-ray optics for the research of EUV lithography at University of Hyogo - TAKEO WATANABE, Center for EUVL, Laboratory of Advanced Science and Technology for Industry, University of Hyogo
11:20-11:40 (20min)
› High reflectance Al/MgF2 mirrors by hot deposition - Juan Larruquert, Instituto de Optica-Consejo Superior de Investigaciones Científicas
11:40-12:00 (20min)
› Broad Band EUV/VUV Multilayer Coatings from 16.9 to 130 nm for a Solar Spectrograph Space Mission - Tobias Fiedler, optiX fab GmbH, Hans-Knöll-Straße 6, 07745 Jena
12:00-12:20 (20min)
› Thin-film preparation and characterization at the HZG - Michael Störmer, Helmholtz-Zentrum Geesthacht
12:20-12:40 (20min)
› Photon-induced damage processes in Ruthenium thin films developed for Free Electron Laser optics - Eric Louis, MESA+ Institute for Nanotechnology, University of Twente
14:00-14:20 (20min)
› Coatings in harsh space environment - Maria Guglielmina Pelizzo, National Reseach Council of Italy
14:20-14:40 (20min)
› A compact soft X-ray reflectometer based on a multi-spectral fluorescence point source - Alexei Erko, Institut für angewandte Photonik (IAP) e. V. Rudower Chaussee 29/31 12489 Berlin
14:40-15:00 (20min)
› X-EUV/XRay Hartmann wavefront sensing for at-wavelength metrology and correction - Fabrice Harms, Imagine Optic
15:00-15:20 (20min)
› Kossel interferences of proton-induced X-ray emission lines to study the interfaces of thin film waveguides - Jiaping Zhang, Sorbonne Université, State Key Laboratory of Solidification Processing, Northwestern Polytechnical University
15:20-15:40 (20min)