PXRNMS2018
7-9 Nov 2018 Palaiseau (France)

Program

Wednesday, November 7, 2018

Time Event  
08:00 - 09:10 Registration and Welcome coffee (Coffee break and exhibition hall)  
09:10 - 09:20 Welcome speech (Conference room)  
09:20 - 10:40 Session 1 (Conference room) - Chairwoman Regina Soufli  
09:20 - 10:00 › Advances in X-ray and EUV Optics Lead to Broadly Based Scientific and Industrial Opportunities - David Attwood, University of California, Berkeley  
10:00 - 10:20 › Piezoelectric actuators for adaptive multilayer mirrors in XUV lithography systems - Mohammadreza Nematollahi, University of Twente [Netherlands]  
10:20 - 10:40 › Extreme ultraviolet multilayers for solar physics applications - Alain Jody Corso, National Research Council of Italy  
10:40 - 11:05 Coffee break (Coffee break and exhibition hall)  
11:05 - 12:30 Session 2 (Conference room) - Cairman Qiushi Huang  
11:05 - 11:30 › Recent progress in the development of neutron polarizing supermirror at J-PARC - Ryuji Maruyama, J-PARC Center, Japan Atomic Energy Agency (invited)  
11:30 - 11:50 › Improved interface widths in Ni/Ti multilayer mirrors by ion-assisted B4C co-deposition - Sjoerd Broekhuijsen, Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden  
11:50 - 12:10 › Neutron polarizing supermirrors for the WASP instrument at the ILL: the end of a mass production coating project. - Thierry Bigault, Institut Laue-Langevin  
12:10 - 12:30 › Large area neutron supermirror and X-ray multilayer mirror deposition facility at Bhabha Atomic Research Centre INDIA - Arup Biswas, Bhabha Atomic Research Centre  
12:30 - 14:00 Lunch (Canteen)  
14:00 - 15:45 Session 3 (Conference room) - Chairman Eric Louis  
14:00 - 14:25 › Metal-on-metal interface formation laws of nanoscale thin films - Anirudhan Chandrasekaran, Industrial Focus Group XUV Optics, MESA+ institute for Nanotechnology, University of Twente, The Netherlands (invited)  
14:25 - 14:45 › Optical constants with improved accuracy in the regions of L-, M- N- and O-absorption edges and their impact in multilayer modeling - Regina Soufli, Lawrence Livermore National Laboratory, Laboratoire Charles Fabry  
14:45 - 15:05 › Growth of Mo/Si multilayers at oblique deposition induces periodical nano-arrays - Dmitriy Voronov, Lawrence Berkeley National Laboratory  
15:05 - 15:25 › Atomic oxygen diffusion in ultrathin transition metal oxide films at near room temperature - Cristiane Stilhano Vilas Boas, MESA+ Institute for Nanotechnology, University of Twente  
15:25 - 15:45 › Manufacturing and characterization of substrates for imaging multilayer X-ray optics - Nikolai Chkhalo, Institute for Physics of Microstructures of Russian Academy of Sciences  
15:45 - 18:00 Poster session and coffee break (Coffee break and exhibition hall)  
15:45 - 18:00 › Advancing X-ray standing wave data analysis - Igor Makhotkin, University of Twente  
15:45 - 18:00 › Angular distribution of a characteristic x-ray emission transmitted by a periodic multilayer - Karine Le Guen, Laboratoire de Chimie Physique - Matière et Rayonnement, Sorbonne Université-CNRS  
15:45 - 18:00 › ATTOLAB SE10: a versatile and integrated beamline for attosecond physics on gases and surfaces - David Bresteau, LIDYL, CEA, CNRS, Université Paris-Saclay, CEA Saclay, 91191 Gif-sur-Yvette, France  
15:45 - 18:00 › Characterization of a monochromatic x-ray imaging using Fresnel zone plates and a multilayer mirror - Annaig CHALEIL, CEA DAM  
15:45 - 18:00 › Characterization of a multilayer x-ray waveguide by x-ray diffuse scattering and grazing incidence x-ray fluorescence - Philippe Jonnard, Laboratoire de Chimie Physique - Matière et Rayonnement - Jussieu  
15:45 - 18:00 › Combined XRR-GIXRF analysis at SOLEIL - Yves Ménesguen, CEA  
15:45 - 18:00 › Dedicated X-ray optics for new generation small X-ray sources - Markus Krämer, AXO DRESDEN GmbH  
15:45 - 18:00 › Derivation of beryllium optical constants from Mo/Be multilayers - Mewael Giday Sertsu, BESSY II, Helmholtz - Zentrum Berlin  
15:45 - 18:00 › Explosive crystallization of Co layers in C/Co/C three-layers - Oleksandr Devizenko, National Technical University “Kharkiv Polytechnic Institute”  
15:45 - 18:00 › Influence of nanometer protective layers on temporal stability and mechanical properties of thin-film aluminium absorption filters - Nikolay Tsybin, Institute of Applied Physics of RAS  
15:45 - 18:00 › Layer structure and phase composition in W/Si multilayer X-ray mirrors - Vitalii Chumak, National Technical University “Kharkiv Polytechnic Institute”  
15:45 - 18:00 › Modeling of EUV multilayers and filters for solar physics and evaluation of tabulated optical constants - Jennifer Rebellato - Centre National d'Études Spatiales, Laboratoire Charles Fabry  
15:45 - 18:00 › Multilayer-based high-precision polarimeter at Diamond Light Source - Hongchang Wang, Diamond Light Source  
15:45 - 18:00 › Observation of Polymer Blend Films on Transmission EUV Microscopy - Mitsunori Toyoda, Tohoku University [Sendai], Tokyo Polytechnic University  
15:45 - 18:00 › Optical properties of graphene at hydrogen Lyman alpha - NADEEM AHMED MALIK, Department of Information Engineering, University of Padova, via Gradenigo 6B, 35131 Padova, Italy, CNR-IFN UOS Padova, Via Trasea 7, 35131 Padova, Italy  
15:45 - 18:00 › Progress on Multilayer-coated Optics for High Energy X-ray Imaging Tools at the US National Labs - Chris Walton, Lawrence Livermore National Laboratory  
15:45 - 18:00 › Spatially resolved EUV and XUV reflectometry - Frank Scholze, Physikalisch-Technische Bundesanstalt  
15:45 - 18:00 › Study on propagation of interface imperfections across Co/Ti multilayers with ultra-short period - Piyali Sarkar, Bhabha Atomic Research Center - Arup Biswas, Bhabha Atomic Research Centre - Dibyendu Bhattacharyya, Bhabha Atomic Research Centre  
15:45 - 18:00 › Surface and interface observation of Zirconium oxynitride films as well as TiN/ZrON bilayers - Yanyan Yuan, Jiangsu University of Science and Technology  
15:45 - 18:00 › Trends on Montel X-ray Optics for Inelastic Scattering and Microfocus X-ray Sources for X-ray Diffractometry - Frank Hertlein, incoatec GmbH  

Thursday, November 8, 2018

Time Event  
09:05 - 10:30 Session 4 (Conference room) - Chairman Eric Ziegler  
09:05 - 09:30 › Advances in hard x-ray aperiodic multilayers for imaging with large field of view - Catherine Burcklen, Lawrence Livermore National Laboratory (invited)  
09:30 - 09:50 › Multilayer mirrors based on beryllium for an extreme ultraviolet range - Vladimir Polkovnikov, Institute for Physics of Microstructures of the RAS  
09:50 - 10:10 › Recent advances in development of Cr/Sc based reflective multilayer coatings for x-ray applications - Evgueni Meltchakov, Laboratoire Charles Fabry  
10:10 - 10:30 › Chromatic Aberration Control on Microscope Imaging System with EUV Multilayer Mirrors - Mitsunori Toyoda, Tohoku University [Sendai], Tokyo Polytechnic University  
10:30 - 10:55 Coffee break (Coffee break and exhibition hall)  
10:55 - 12:40 Session 5 (Conference room) - Chairwoman Maria Pelizzo  
10:55 - 11:20 › X-Ray Spectroscopic Methods for Thin Films and Interfaces Study - Elena Filatova, Institute of Physics, St-Petersburg State University, Ulyanovskaya Str. 3, Peterhof, 198504, St. Petersburg (invited)  
11:20 - 11:40 › Proximity effect in Co/Pt multilayer investigated through X-ray resonant magnetic reflectivity - Adriano Verna, Università degli Studi Roma Tre  
11:40 - 12:00 › Angle-Resolved XRF for Depth-Resolved Elemental Analysis of Stratified Materials in the Laboratory - Jonas Baumann, Technical University Berlin  
12:00 - 12:20 › Correlated lateral density fluctuations in the Si layers of a W/Si multilayer revealed by GISAXS - Igor Makhotkin, University of Twente  
12:20 - 12:40 › Study of Pd/Y multilayers with B4C barrier layers using GIXR and x-ray standing wave enhanced HAXPES - Meiyi Wu, Sorbonne Université, Faculté des Sciences et Ingénierie, UMR CNRS, Laboratoire de Chimie Physique - Matière et Rayonnement  
12:40 - 14:00 Lunch (Canteen)  
14:00 - 17:00 Lab Tour - You will have the choice to visit SOLEIL SYNCHROTRON or ATTOLAB or LCFIO.  
19:00 - 22:30 Conference dinner - Train Bleu restaurant in Gare de Lyon, Paris  

Friday, November 9, 2018

Time Event  
09:05 - 10:30 Session 6 (Conference room) - Chairman Thierry Bigault  
09:05 - 09:30 › Multilayer coated nanogratings with sub-50 nm periodicity for ultrahigh resolution soft X-ray spectroscopy - Qiushi Huang, Key Laboratory of Advanced Micro-Structured Materials, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University (invited)  
09:30 - 09:50 › Gratings for VUV to X-ray applications - François Polack, Synchrotron SOLEIL  
09:50 - 10:10 › Highly efficient multilayer-coated blazed gratings for the tender X-ray energy range - Andrey Sokolov, Helmholtz-Zentrum Berlin für Materialien und Energie, BESSY-II, Albert-Einstein-Str. 15, 12489 Berlin, Germany  
10:10 - 10:30 › Nearly perfect blaze of the X-ray multilayer-coated gratings with non-conformal boundaries - Maxim Lubov, St. Petersburg Academic University  
10:30 - 10:55 Coffee break (Coffee break and exhibition hall)  
10:55 - 12:40 Session 7 (Coffee break and exhibition hall) - Chairman Nicholai Chkhalo  
10:55 - 11:20 › Multilayer x-ray optics at the ESRF - Christian Morawe, The European Synchrotron (invited)  
11:20 - 11:40 › Research activity of evaluation tools including soft X-ray optics for the research of EUV lithography at University of Hyogo - TAKEO WATANABE, Center for EUVL, Laboratory of Advanced Science and Technology for Industry, University of Hyogo  
11:40 - 12:00 › High reflectance Al/MgF2 mirrors by hot deposition - Juan Larruquert, Instituto de Optica-Consejo Superior de Investigaciones Científicas  
12:00 - 12:20 › Broad Band EUV/VUV Multilayer Coatings from 16.9 to 130 nm for a Solar Spectrograph Space Mission - Tobias Fiedler, optiX fab GmbH, Hans-Knöll-Straße 6, 07745 Jena  
12:20 - 12:40 › Thin-film preparation and characterization at the HZG - Michael Störmer, Helmholtz-Zentrum Geesthacht  
12:40 - 14:00 Lunch (Canteen)  
14:00 - 15:40 Session 8 (Conference room) - Chairman Hartmut Enkisch  
14:00 - 14:20 › Photon-induced damage processes in Ruthenium thin films developed for Free Electron Laser optics - Eric Louis, MESA+ Institute for Nanotechnology, University of Twente  
14:20 - 14:40 › Coatings in harsh space environment - Maria Guglielmina Pelizzo, National Reseach Council of Italy  
14:40 - 15:00 › A compact soft X-ray reflectometer based on a multi-spectral fluorescence point source - Alexei Erko, Institut für angewandte Photonik (IAP) e. V. Rudower Chaussee 29/31 12489 Berlin  
15:00 - 15:20 › X-EUV/XRay Hartmann wavefront sensing for at-wavelength metrology and correction - Fabrice Harms, Imagine Optic  
15:20 - 15:40 › Kossel interferences of proton-induced X-ray emission lines to study the interfaces of thin film waveguides - Jiaping Zhang, Sorbonne Université, State Key Laboratory of Solidification Processing, Northwestern Polytechnical University  
15:40 - 15:50 Closing speech (Conference room)  
  
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